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PM8 manual probe system
  • PM8 manual probe system
  • EPS200MMW with T-Wave Probes and VDI WR2.2 Extenders for Measurements up to 500 GHz
  • EPS200RF Design

Highly Stable, Ergonomic and Flexible Manual Probe Station

The PM8 is designed to provide a highly stable, ergonomic and flexible probing platform for precise analytical probing applications up to 200 mm, such as device and wafer characterizations, failure analysis (FA), RF/mmW and sub-THz probing, opto-engineering and MEMS.

PM8 mechanics

Superior Mechanics

  • Highly stable granite base
  • Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
  • 1 µm repeatable separation stroke
  • Excellent measurement accuracy and repeatability
  • Fast navigation and high-precision probe positioning

Flexible EPS200MMW System

High Flexibility

  • Re-configurable for DC, RF, mmW, FA, WLR and more
  • Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
  • 40 mm platen height adjustability
  • Upgrade path to meet your future needs
  • Fast transition between wafer and package test

EPS200RF Design

Ease of use

  • Low-profile, straightforward design
  • Easy and ergonomic operation

PM8 Probe Station - Double-side Option

Double-side option

  • Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
  • Front or backside probing capability
  • Access to top side and bottom side of device under test (DUT)
  • Highly accurate light measurement

  • Failure Analysis
  • IV/CV
  • MEMS
  • RF/mmW/THz

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1.1 THz Calibration on an EPS200MMW Manual Wafer Probe Station

This video gives an overview of a typical calibration run at 1.1 THz on a Cascade EPS200MMW manual probe station with THz SIGMA Kit. WinCal XE calibration software runs directly on a 67GHz PNA from Keysight Technologies. The frequency extenders are 1.1 THz models from Virginia Diodes and probes are Cascade T-Wave Probes.


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SourceOne – Certified Pre-Owned Equipment

You want the best price-performance ratio for your wafer probe station? With our Certified Used Equipment we have an attractive option for you.

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SourceOne – Factory Refurbishment Program

Extend the use of your probe station for up to another 15 years with our Factory Refurbishment Program.

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SourceOne – Trade In / Buy Back Program

We'll take your probe station back for a credit note.

Icon PM8 Product Highlights
Icon PM8 Data Sheet
Icon Making Accurate and Consistent Wafer Measurements with Next Generation Guarded True-Kelvin MEMS DC Probes
Icon Velox for Manual Probe Stations
Icon PM8DSP Data Sheet
Icon Advanced mm-Wave and Terahertz Measurements with Cascade Probe Stations
Icon Advanced mm-Wave Load-Pull Measurements
Icon Improving Wafer-Level S-parameters Measurement Accuracy and Stability with Probe-Tip Power Calibration up to 110 GHz for 5G Applications
Icon PM8 Facility Planning Guide
Icon Probe Positioners Brochure
Icon Cascade Probe Systems Brochure
Icon Probe Station Accessory Catalog
Icon Global Services Brochure (Cascade Probe Systems)
Icon SourceOne Factory-Refurbished Equipment Brochure