MPS150 Data Sheet
The MPS150 is a very cost-effective and simple, yet highly-precise manual probe system for wafers and substrates up to 150 mm. It supports a wide variety of applications such as C-V/I-V, RF, mm-Wave and sub-THz measurements, device and wafer characterization tests (DWC), failure analysis (FA), submicron probing, MEMS, optoelectronic engineering tests and more. Its stable platen is designed to accommodate up to sixteen positioners, providing a function similar to a probe card for special wafer-level reliability (WLR) applications.
Created: August 15, 2017 | Updated: June 1, 2018 | Type: pdf | Size: 650.90 KB