The CM300xi probe station addresses the measurement challenges posed by extremely complex environments, including unattended testing on small pads over extended periods and at multiple temperatures. It delivers best-in-class measurement performance across a wide range of applications within an EMI-shielded, light-tight, and moisture-free test environment. Enhanced thermal management and lab automation capabilities lead to improved yields and faster time to data.

The optional ReAlign™ feature enables “off-axis” probe-to-pad alignment independent of the main eVue microscope. ReAlign is ideal for probe cards that do not permit direct overhead viewing of pads and probe tips, such as vertical and Pyramid probe cards. The ReAlign hardware includes two additional cameras: the “Platen Camera,” integrated directly into the CM300xi’s platen, which observes the pads, and the upward-looking “ChuckView Camera,” which characterizes the probe tips. The ReAlign wizard facilitates easy and quick setup with predefined algorithms for various probe cards, including Pyramid, Apollo, and Cantilever. ReAlign can also automatically manage temperature transitions without requiring operator intervention.

ReAlign Enables:

  • Automation of temperature transitions
  • No manual re-training is required after loading a new wafer of the same type

The ReAlign Wizard:

  • Guides through setup steps
  • Predefined algorithms for different Probe Cards, such as Pyramid, Apollo, Cantilever, etc.

ReAlign Benefits include:

  • Platen camera is directly integrated into Platen
  • Remote automation over different temperatures
  • Probe Card Holder easily interchangeable with other platen inserts – 8-sided, TopHat, RF TopHat, IceShield

For more information, visit the CM300xi Product Overview or explore the ReAlign interactive brochure.