Continued growth in THz applications requires the availability of quality test and measurement equipment. Typically, individual devices must be diced and mounted to a fixture for measurement. Robust and calibrated on-wafer measurements of planar millimeter and sub-millimeter wave devices would significantly reduce the effort required to characterize a wafer of devices while increasing the accuracy of the measurement by eliminating errors and effects associated with fixtures.

Under the MeasureOne™ collaboration with DMPI, we now offer the T-Wave probe. T-Wave probes are millimeter and sub-millimeter wavelength on-wafer ground-signal-ground probes for electrical measurement of devices and materials with frequencies from 220 GHz to 1.1 THz. T-Wave probes offer low insertion loss, as well as excellent probe tip and sample visibility. For THz measurements at the probe tip, the importance of probe placement onto the calibration standards is critical. In order to make accurate and repeatable measurements above 500 GHz, probe placement errors need to be less than 1 μm, and this is challenging to achieve with a manual probe station and positioners.

T-Wave probes feature:

  • Low insertion loss
  • Low contact resistance
  • 220 GHz to 1.1 THz
  • Probe pitch as narrow as 25 μm
  • Lithographically defined tip
  • Nickel contacts

These T-Wave probe features translate into some strong advantages:

  • Excellent tip visibility
  • Ability to characterize 1.1 THz devices
  • Typical insertion loss is less than 1.5 dB between 140 and 220 GHz
  • Integrated DC bias-T with low profile GPPO connector

The T-Wave probe was validated on our EPS200MMW manual probe station, as well as the Summit 200 mm, and the Elite 300 mm on-wafer probe systems.

For more information, visit our MeasureOne solutions page on our site.